Zhengzhou TCH Instrument Co., Ltd.
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Mini Plasma Sputtering Coater With Vacuum Pump & Gold Target, 1.5" Max Sample - GSL-1100X-SPC12-LD

— Mini Plasma Sputtering Coater, Plasma Sputtering Coater, Coater
Product Category: Lab Analyzers
Sales Method: Manufacture, OEM/ODM
Payment Term: T/T
Trade Term (Incoterms): EXW
Min. Order Unit Price
1 Set USD 3500 / Set

Product Detail

Product Attribute:

  • China (mainland) More >
  • TCH
  • 08/21/2017
  • 08/22/2017

Product Content Description:

Mini Plasma Sputtering Coater with Vacuum Pump & Gold Target, 1.5" Max Sample - GSL-1100X-SPC12-LD


GSL-1100X-SPC12-LD is a compact plasma sputtering coater designed for making metallic coatings, such as gold, platinum, Indium and silver etc. Especially for coating conductive gold film for SEM sample. The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold sputtering target (gold cathode), vacuum pump, stainless steel bellows and quick clamps.

Specification:

Input Power
  • Single phase 208 - 240 VAC, 50 / 60 Hz
  • < 1000 W (including vacuum pump)
  • If the voltage is 110 V, a 1500 W transformer can be ordered at MTI (Click the picture to the left for detail)
Vacuum Chamber
  • Vacuum chamber: 100 mm ID x 130 mm H, made of fused glass
  • Sealing flange made of stainless
  • Needle valve on front panel for gas flow control
Sample Stage

 
  • Stage size: 40 mm Dia.
  • Sputtering distance range: 15 - 80 mm adjustable
Control Panel
  • Vacuum gauge and sputtering current meter for monitoring deposition
  • Needle valve on front panel for gas flow control
  • Sputtering timer: 0 - 110 s adjustable
Vacuum Pump



 
The followings are included: 
  • 156 L/m Double Stage Rotary Vane Vacuum Pump with vapor trap (Max vacuum 1.0E-2 Torr)
  • Stainless steel bellows with KF16 adapter and quick clamps
  • Two Stage Exhaust Filter on vacuum pump to eliminate oil vapor contamination
  • One High purity Au target (57 mm Dia. x 0.12 mm, 4N purity)
Optional: you may use a turbo pump to achieve 1.0E-5 Torr vacuum by a turbo pump (Click the bottom right picture)
           
             

Sputtering Targets

  • Target size requirements: 57 mm Dia. x 0.5 mm max
  • 4N purity gold foil: 57 mm Dia. x 0.12 mm (Included and pre-installed on coater) 
               
  • Optional Targets are available (Click below to order)
    • Au target (57 mm Dia. x 0.12 mm, 4N purity) 
    • Pt target (57 mm Dia. x 0.12 mm, 4N purity)  
    • Ag target (57 mm Dia. x 0.5 mm, 4N purity)  

Size

  •        480 mm L x 320 mm W x 280 mm H

Net Weight

  • 20 kg

Shipping Weight

  • 55 kg (120 lbs) with 1020 mm x 790 mm x 560 mm (40" x 31" x 22") dimension with crating

Compliance

  • CE approval

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