Shanghai Stomee Industrial Co., Ltd.
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SOI (Silicon-on-insulator)

Product Category: Semiconductor Materials
Sales Method: Export, Manufacture
Payment Term: T/T
Min. Order Unit Price

Product Detail

Product Attribute:

  • China (mainland) More >
  • Bonding
  • Stomee
  • 05/17/2006
  • 01/01/2011

Product Content Description:

By using bonding chemistry between silicon (Si) and silicon
dioxide (SiO2) or between SiO2 and SiO2 effectively, two Si
wafers are tightly bonded with a SiO2 layer as an insulator
inside the bonded pair. After one side of the Si bulk is
thinned down properly with a desired active Si layer
thickness, bonded SOI wafers are obtained. Three basic
steps accomplish the fabrication process. The first step is
to mate a thermally oxidized wafer on a non-oxidized wafer
at room temperature. The second step is to anneal the
bonded pair to increase bonding strength. The third step is
to thin down one side of the bonded pair to an appropriate
thickness by grinding, etching and polishing

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