Shanghai Stomee Industrial Co., Ltd.
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SOI (Silicon-on-Insulator)

Product Category: Semiconductor Materials
Sales Method: Export, Manufacture
Payment Term: T/T
Min. Order Unit Price

Product Detail

Product Attribute:

  • China (mainland) More >
  • Simox
  • Stomee
  • 05/15/2006
  • 01/01/2011

Product Content Description:

Simox, which stands for separation by implantation of
oxygen, is a process that we uses to create an insulating
layer between the layers of a bulk silicon wafer. There are
two essential stages of the process: ion implantation and
annealing. In the implantation stage, oxygen ions are
implanted in the silicon wafer and react with the silicon
to form silicon dioxide precipitates. However, the
implantation causes considerable damage to the wafer and
the layer of silicon dioxide precipitates is not
continuous. Thus high-temperature annealing helps repair
the damage and form the oxide precipitates into a
continuous layer. Now the silicon's quality is restored and
the buried oxide (Box) layer can act as a highly effective
insulator.

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