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MFC2030/MFC2070 Bi-Directional Digital MEMS Gas Flow Sensor

Post Date:

2019/01/03 17:05:31

Expired Date:

2019/04/03 23:59:59

Trade Leads Category:

Flow Sensors

Company Info

Shenzhen Week Technology Ltd.
Contact Person: Yan Zhang
Address: 16 Floor, Building #3, Zhongke Mansion, Gaoxin South 1St Rd, Hi-Tech Park, Nanshan
City: SHENZHEN
State/Province: GUANGDONG
Country/Region: China (mainland)
Zip/Post Code: 518067


Details

High Performance Bi-Directional
Digital MEMS Gas Flow Sensor
MFC2000 Series

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor DESCRIPTION
MFC2000 series is a new gas flow sensing module platform based on MEMSIC’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/-3.0% accuracy. 

The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital or analog output with very high repeatability. The  module  has  very  low  operating  power consumption (< 5 mA) and a low power consumption sleep mode (<100 µA) for optimal power management in portable applications. The MFC2000 series is externally powered, up to 5.5V (3.3V typ.). I2C digital output is standard. Other output available upon request.

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor FEATURES
•  Bi-directional flow
•  High dynamic range
•  ±3% m.v. accuracy
•  ±0.6% m.v. repeatability
•  Low power consumption
•  Fast response time
•  Single 2.7 - 5.5Vdc power supply
•  Digital I2C and analog outputs
•  Standard fitting sizes
•  Custom fluid connector available
•  Temperature compensated
•  Highly configurable firmware
•  Easy-to-use PC-based GUI
•  RoHS and WEEE compliant

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor APPLICATIONS
• Medical gas flow measurement and control
• Industrial gas flow measurement and control
• Consumer products

MFC2030/MFC2070 Digital MEMS Gas Flow SensoCHARACTERISTICS
(Measurements performed with air at 23°C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply, unless otherwise specified). Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.

Parameter Condition 30 SLM 70 SLM Unit
Measurement Range Direct port +/- 30 +/- 70 SLM
Flow Direction   Bi-directional N/A
Supply DC Voltage (VDD)   2.7 - 5.5 Vdc
Interface Voltage (VDDIO) (See note 1) 2.7 - 3.0 V
Output Range I2C Mode 0 - 65,535 LSB
Analog Mode 0 - VDDIO Vdc
Operating Temperature   (20) - 80 °C
Calibrated Temperature   0 - 50 °C
Storage Temperature   (40) - 85 °C
Relative Humidity non-condensing 0 - 95 %
Supply Current Continuous, Fs = 100Hz 5 mA
Sleep mode 100 µA
Accuracy 1% Qmax ≤ Q < 100% Qmax 3.0 % m.v.
Q < 1% Qmax 0.03 % FS
Repeatability ODR =100Hz 0.1Qmax ≤ Q ≤ Qmax 0.6 % m.v.
Q < 0.1Qmax 0.06 % FS
ODR =10Hz 0.1Qmax ≤ Q ≤ Qmax 0.2 % m.v.
Q < 0.1Qmax 0.02 % FS
ODR =1Hz 0.1Qmax ≤ Q ≤ Qmax 0.05 % m.v.
Q < 0.1Qmax 0.005 % FS
Offset Shift w/Temp. 0 - 50°C 2 SCCM/°C
Span Shift 0 - 50°C 0.1 % m.v./°C
Pressure Drop Q max 4 18 mbar
Sample Rate/Response Time   10 ms
Orientation Sensitivity   TBD % m.v
Wake Time Wake up from sleep mode 40 ms
Working Pressure   0 - 8 Bar
Module Weight Includes aluminum inserts < 100 g
Wetted Material
Si, SiO 2 , Si 3 N 4 , Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber,
Aluminum alloy 3003, Epoxy, Silicone

MFC2030/MFC2070 Digital MEMS Gas Flow SensoABSOLUTE MAXIMUM RATINGS
Supply Voltage (VDD) 2.7 to +5.5V
Storage Temperature -40°C to +85°C
Pressure 0 - 8 Bar Gauge
Shock 10g, 0.5ms
Vibration 1g, 5 to 200 Hz
ESD 4kV/8kV (contact/air discharge)

MFC2030/MFC2070 Digital MEMS Gas Flow SensoORDERING INFORMATION