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XEN-TCG3880 Thermal Conductivity Gas Sensor

Post Date:

2018/12/18 16:40:41

Expired Date:

2019/03/18 23:59:59

Trade Leads Category:

Gas Sensors

Company Info

Shenzhen Week Technology Ltd.
Contact Person: Yan Zhang
Address: 16 Floor, Building #3, Zhongke Mansion, Gaoxin South 1St Rd, Hi-Tech Park, Nanshan
State/Province: GUANGDONG
Country/Region: China (mainland)
Zip/Post Code: 518067


XEN-TCG3880 Thermal Conductivity Sensor Short description
The XEN-TCG3880 is a thermal conductivity gauge (TCG) made using silicon technology. The sensor chip consists of a silicon rim of 2.50 x 3.33 mm, 0.3 mm thick, in which a silicon-nitride membrane is created. In the center is a heater, with a sensor element measuring its temperature. The chip measures the thermal conductance between the ambient and the center of the mem-brane, and this depends on several parameters, such as pressure, gas type, and material depo-sitions on the membrane. This dependence upon physical parameters allows the TCG to measure such quantities as absolute pressure, gas mixture composition, and material properties.

The standard housing for the XEN-TCG3880 is a TO-5 10-pins header, other housings are avail-able on request.

The XEN-TCG3880Pt has a class B Pt100 platinum temperature sensor on the TO-5 housing, next to the chip.

XEN-TCG3880 Thermal Conductivity Sensor Applications
Gas type measurement:
• Measurement of thermal conductivity
• Measurement of concentration of Helium, CO2, etc, in air
• Measurement of binary gas-mixture composition
Vacuum measurement:
• Vacuum measurement between 10 mPa and 10 kPa
• Sealed gas-enclosure leakage

Specifications (22°C and 1 V power supply)

Parameter typ unit  symbol notes
  size naked die 2.50 x 3.33 mm2    
  thickness naked die 0.3 mm    
  thickness membrane 1 µm    
  in vacuum at 0 mbar 130 V/W   depending on production batch
  temperature coefficient (0 Pa) -0.06 %/K    
  in air at 1013 mbar 30 V/W   no upper heat sink
  in air at 1013 mbar 6 V/W   with upper heat sink at 20 µm
  in helium at 1013 mbar 7 V/W    
Time constant     t  
  in air 9 ms    
  in vacuum 36 ms    
  short term 10 ppm   1 day, good temp + RH stabilization
  long term 1200 ppm   1 year, temperature & Rel. Humidity correction
  resistance 55 Rtp  
  effective sensitivity 1.3 mV/K Stp Referred to temperature of heater
  intrinsic sensitivity 2.4 mV/K   Average Seebeck coefficient 0.2 mV/K, 12 leads
  temperature coefficient 0.05 %/K    
 resistance 0.6 Rheat  
  temperature coefficient 0.1 %/K    
Thermal resistance        
  membrane 100 kK/W   vacuum output divided by thermopile sensitivity
 temperature coefficient -0.11 %/K   in vacuum
 membrane + gas 23 kK/W   air
 temperature coefficient -0.08 %/K   air
Maximum heating voltage     Uheat  
 in air 2.5 V    
  in vacuum 1 V    
Sensor ambient temperature       Without guarantee for lifetime
  minimum -196 °C   no significant change in output
-250 °C   probably no significant change in output
-250 to -273 °C   reduced output
  maximum 240 °C   tested on similar devices, short times
Heater maximum temperature 250 °C   Long term no drift, absolute maximum rating
  Pt100 class B ± 0.3 °C   Error at 0°C


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