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FilmTek Spectrophotometer-Based Metrology System

Product Category: Electronic Measuring & Testing Instruments/n.e.s.
Sales Method: Export
Payment Term: L/C
Min. Order Unit Price

Product Detail

Product Attribute:

  • United States of America More >
  • FilmTek4000
  • SCI
  • 02/19/2001
  • 01/01/2011

Product Content Description:

1. Film thickness from a few angstroms to 350um
2. Film properties in the wavelength range of 190-1700nm
3. Independent determination of index of refraction and
thickness
4. Index of refraction
5. Extinction coefficient
6. Anisotropy of index of refraction (TE&TM capability)
7. Index measurement with a resolution of 2X10E5
8. Damage in Si wafer due to prior processing
9. Eg
10. Composition, crystallinity and moisture/solvent(EMA)
11. Graded layers in which the film compostion varies as a
function of depth
12. Surface roughness with similar as AFM
13. Thin metallic films such as GMR
14. Film properties vs temperature
15. Multilayer characterization
16. Inhomgerneous layer

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