Chen-I Vacuum Technology Enterprise
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Computer control electron beam source / thermal vacuum auto evaporation coater

Product Category: Electroplating Equipments
Sales Method: Manufacture
Payment Term: T/T, L/C
Min. Order Unit Price

Product Detail

Product Attribute:

  • Taiwan More >
  • VCO-101-E-A
  • 01/10/2011
  • 08/22/2011

Product Content Description:

.Application:high quality oporical film as glass,
pc and wafer?..etc.,
.Feature:automatic conating process & pressure
control, fast pumpong rate, good film uniformity,automatic
control and protection by plc and computer
.SPEC:
1. Main power:3phase 220/380v.50/60 hz approx
120-250a  
2. Sus chamber:dia.1100/1400mm x h.1200/1600mm;(or
customer spec)  
3. System control:computer plc automatic control and
protection
4. Vacuum pumps:mechanic pump/4500/8500 l/min
roos pump/1600/3400 m3/hr
diffusion pump/23000 l/sec/26inch
customer spec 
.Thickness controller:optical or crystal 
.E-beam:5-10 kw on 4x30 cc crucibles  
.Necessary space.weight(approx):  
w x d x h:2800mm x 1500mm x
2400mm,3000-5000kg  
.Optional:plasma.ion source cleaning & Assist
coating  
.Gas mass flow controller

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