Chen-I Vacuum Technology Enterprise
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Electron beam/thermal vacuum evaporation coater

Product Category: Electroplating Equipments
Sales Method: Manufacture
Payment Term: T/T, L/C
Min. Order Unit Price

Product Detail

Product Attribute:

  • Taiwan More >
  • VCO-101-E
  • 01/10/2011
  • 08/22/2011

Product Content Description:

1. Application:high quality optical film glass, pc
and wafer?etc.,
2. Feature:fast pumping rate, good film uniformity,
automatic control and protection
3. SPEC:
Main power:3phase 220/380v.50/60 hz approx 120-250 a
Sus chamber:dia.1100/1400mm x h.1200/1600mm(or
customer spec)
System control:plc automatic control and
protection  
Vacuum pumps:mechanic pump/4500/8500 l/min
roos pump/1600/3400 m3/hr
diffusion pump/23000 l/sec/26inch
customer spec
Thickness monitor:optical or crystal
E-beam:5-10 kw on 4x30 cc crucibles  
Necessary space.weight (approx):  
wxdwh: 2800 mmx 1500 mm x 2400 mm , 3000-5000 kg
4. Optional:plasma. Ion source cleaning & assist
coating  
Gas mass flow controller

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